Zinc malonate based precursors for MOCVD of ZnO

D. Bekermann, D. Pilard, R. A. Fischer, A. Devi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

This work deals with the development of alternative metal organic precursor compounds for the growth of zinc oxide by MOCVD. In this regard we focused on fluorine-free zinc complexes using chelating ligands. A series of Bis(malonato)zinc(II) complexes was synthesized and characterized by elemental analysis (EA), mass spectrometry (MS), proton and carbon NMR spectroscopy. The precursor properties were investigated by solubility and sublimation studies, differential thermal analysis (DTA) and thermogravimetry (TG). Density Functional Theory (DFT) studies were performed to investigate the influence of the ligand environment on the heat of formation of the precursors and their reactivity towards humidity.

Original languageEnglish
Title of host publicationECS Transactions - EuroCVD 17/CVD 17
Pages601-608
Number of pages8
Edition8 PART 1
DOIs
StatePublished - 2009
Externally publishedYes
Event17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Austria
Duration: 4 Oct 20099 Oct 2009

Publication series

NameECS Transactions
Number8 PART 1
Volume25
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
Country/TerritoryAustria
CityVienna
Period4/10/099/10/09

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