Yttria-stabilized zirconia thin films by pulsed laser deposition: Microstructural and compositional control

S. Heiroth, T. Lippert, A. Wokaun, M. Döbeli, J. L.M. Rupp, B. Scherrer, L. J. Gauckler

Research output: Contribution to journalArticlepeer-review

75 Scopus citations


The ns-laser ablation characteristics of tetragonal 3YSZ versus cubic 8YSZ have been investigated to minimize a transfer of particulates in the pulsed laser deposition process. 3YSZ is significantly less prone to the exfoliation of μm-sized fragments than 8YSZ due to its enhanced fracture toughness, which allows the deposition of particulate-free films in a fluence range of 1.2-1.5 J/cm2. The influence of the PLD process parameters on the film microstructure and stoichiometry have been investigated with respect to the growth of dense 3YSZ layers with adequate adhesion to the c-cut sapphire single crystals. Dense 3YSZ films are obtained below a threshold pressure of ∼0.025 mbar. At 600 °C polycrystalline layers with a preferential (1 0 1) and (0 0 1) orientation and a columnar microstructure are formed while deposition at room temperature yields uniform amorphous layers. Strongly oxygen deficient films of the metastable t′′ phase are obtained at a low background pressure of 10-3 mbar. The meta phase films exhibit a low activation energy of 0.77 ± 0.02 eV and an enhanced d.c. electrical conductivity, e.g. 9 × 10-5 S/cm at 400 °C, comparable or even higher than for 8YSZ films and bulk at temperatures up to 500 °C.

Original languageEnglish
Pages (from-to)489-495
Number of pages7
JournalJournal of the European Ceramic Society
Issue number2
StatePublished - Jan 2010
Externally publishedYes


  • Electrical conductivity
  • Films
  • Fuel cells
  • Microstructure-final
  • YSZ


Dive into the research topics of 'Yttria-stabilized zirconia thin films by pulsed laser deposition: Microstructural and compositional control'. Together they form a unique fingerprint.

Cite this