YBa2Cu3O7-x deposition of large moving plates for continuous processing

Ch Hoffmann; A. Lümkemann; U. Schmatz; M. Bauer; R. Metzger; P. Berberich; H. Kinder

doi:10.1109/TASC.2003.812030

YBa₂Cu₃O_7-x deposition of large moving plates for continuous processing

Ch Hoffmann
, A. Lümkemann
, U. Schmatz
, M. Bauer
, R. Metzger
, P. Berberich
, H. Kinder

Department of Physics

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

YBa₂Cu₃O_7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (J_c) over 3 MA/cm² were achieved while on 10 cm × 20 cm sapphire substrates a J_c of 2.2 MA/cm² could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm² and 1.5 MA/cm² on IBAD buffered metal tapes.

Original language	English
Pages (from-to)	2879-2881
Number of pages	3
Journal	IEEE Transactions on Applied Superconductivity
Volume	13
Issue number	2
DOIs	https://doi.org/10.1109/TASC.2003.812030
State	Published - Jun 2003

Keywords

Co-evaporation
Thin films
YBCO

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10.1109/TASC.2003.812030

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title = "YBa2Cu3O7-x deposition of large moving plates for continuous processing",

abstract = "YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm {\texttimes} 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm {\texttimes} 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.",

keywords = "Co-evaporation, Thin films, YBCO",

author = "Ch Hoffmann and A. L{\"u}mkemann and U. Schmatz and M. Bauer and R. Metzger and P. Berberich and H. Kinder",

note = "Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universit{\"a}t M{\"u}nchen, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030",

year = "2003",

month = jun,

doi = "10.1109/TASC.2003.812030",

language = "English",

volume = "13",

pages = "2879--2881",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

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TY - JOUR

T1 - YBa2Cu3O7-x deposition of large moving plates for continuous processing

AU - Hoffmann, Ch

AU - Lümkemann, A.

AU - Schmatz, U.

AU - Bauer, M.

AU - Metzger, R.

AU - Berberich, P.

AU - Kinder, H.

N1 - Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universität München, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030

PY - 2003/6

Y1 - 2003/6

N2 - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

AB - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

KW - Co-evaporation

KW - Thin films

KW - YBCO

UR - https://www.scopus.com/pages/publications/0042466494

U2 - 10.1109/TASC.2003.812030

DO - 10.1109/TASC.2003.812030

M3 - Article

AN - SCOPUS:0042466494

SN - 1051-8223

VL - 13

SP - 2879

EP - 2881

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2

ER -

YBa₂Cu₃O_7-x deposition of large moving plates for continuous processing

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Keywords

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