YBa2Cu3O7-x deposition of large moving plates for continuous processing

Ch Hoffmann; A. Lümkemann; U. Schmatz; M. Bauer; R. Metzger; P. Berberich; H. Kinder

doi:10.1109/TASC.2003.812030

YBa₂Cu₃O_7-x deposition of large moving plates for continuous processing

Ch Hoffmann, A. Lümkemann, U. Schmatz, M. Bauer, R. Metzger, P. Berberich, H. Kinder

Department of Physics

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

YBa₂Cu₃O_7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (J_c) over 3 MA/cm² were achieved while on 10 cm × 20 cm sapphire substrates a J_c of 2.2 MA/cm² could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm² and 1.5 MA/cm² on IBAD buffered metal tapes.

Original language	English
Pages (from-to)	2879-2881
Number of pages	3
Journal	IEEE Transactions on Applied Superconductivity
Volume	13
Issue number	2
DOIs	https://doi.org/10.1109/TASC.2003.812030
State	Published - Jun 2003

Keywords

Co-evaporation
Thin films
YBCO

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10.1109/TASC.2003.812030

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title = "YBa2Cu3O7-x deposition of large moving plates for continuous processing",

abstract = "YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.",

keywords = "Co-evaporation, Thin films, YBCO",

author = "Ch Hoffmann and A. L{\"u}mkemann and U. Schmatz and M. Bauer and R. Metzger and P. Berberich and H. Kinder",

note = "Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universit{\"a}t M{\"u}nchen, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030",

year = "2003",

month = jun,

doi = "10.1109/TASC.2003.812030",

language = "English",

volume = "13",

pages = "2879--2881",

journal = "IEEE Transactions on Applied Superconductivity",

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T1 - YBa2Cu3O7-x deposition of large moving plates for continuous processing

AU - Hoffmann, Ch

AU - Lümkemann, A.

AU - Schmatz, U.

AU - Bauer, M.

AU - Metzger, R.

AU - Berberich, P.

AU - Kinder, H.

N1 - Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universität München, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030

PY - 2003/6

Y1 - 2003/6

N2 - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

AB - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

KW - Co-evaporation

KW - Thin films

KW - YBCO

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2

ER -

YBa₂Cu₃O_7-x deposition of large moving plates for continuous processing

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Keywords

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