Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

Hooman A. Davani; Christian Grasse; Benjamin Kögel; Petter Westbergh; Christian Gierl; Karolina Zogal; Sandro Jatta; Gerhard Böhm; Tobias Gründl; Peter Meissner; Anders Larsson; Markus Christian Amann

doi:10.1109/ISLC.2010.5642777

Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

Hooman A. Davani
, Christian Grasse
, Benjamin Kögel
, Petter Westbergh
, Christian Gierl
, Karolina Zogal
, Sandro Jatta
, Gerhard Böhm
, Tobias Gründl
, Peter Meissner
, Anders Larsson
, Markus Christian Amann

Chair of Semiconductor Technology

Technical University
Walter Schottky Institut
Chalmers University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.

Original language	English
Title of host publication	2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010
Pages	9-10
Number of pages	2
DOIs	https://doi.org/10.1109/ISLC.2010.5642777
State	Published - 2010
Event	2010 IEEE 22nd International Semiconductor Laser Conference, ISLC 2010 - Kyoto, Japan Duration: 26 Sep 2010 → 30 Sep 2010

Publication series

Name	Conference Digest - IEEE International Semiconductor Laser Conference
ISSN (Print)	0899-9406

Conference

Conference	2010 IEEE 22nd International Semiconductor Laser Conference, ISLC 2010
Country/Territory	Japan
City	Kyoto
Period	26/09/10 → 30/09/10

Access to Document

10.1109/ISLC.2010.5642777

Cite this

Davani, H. A., Grasse, C., Kögel, B., Westbergh, P., Gierl, C., Zogal, K., Jatta, S., Böhm, G., Gründl, T., Meissner, P., Larsson, A., & Amann, M. C. (2010). Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL. In 2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010 (pp. 9-10). Article 5642777 (Conference Digest - IEEE International Semiconductor Laser Conference). https://doi.org/10.1109/ISLC.2010.5642777

@inproceedings{47364bff8d97423ca321dbcf7933029c,

title = "Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL",

abstract = "We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.",

author = "Davani, \{Hooman A.\} and Christian Grasse and Benjamin K{\"o}gel and Petter Westbergh and Christian Gierl and Karolina Zogal and Sandro Jatta and Gerhard B{\"o}hm and Tobias Gr{\"u}ndl and Peter Meissner and Anders Larsson and Amann, \{Markus Christian\}",

year = "2010",

doi = "10.1109/ISLC.2010.5642777",

language = "English",

isbn = "9781424456833",

series = "Conference Digest - IEEE International Semiconductor Laser Conference",

pages = "9--10",

booktitle = "2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010",

note = "2010 IEEE 22nd International Semiconductor Laser Conference, ISLC 2010 ; Conference date: 26-09-2010 Through 30-09-2010",

}

Davani, HA, Grasse, C, Kögel, B, Westbergh, P, Gierl, C, Zogal, K, Jatta, S, Böhm, G, Gründl, T, Meissner, P, Larsson, A & Amann, MC 2010, Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL. in 2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010., 5642777, Conference Digest - IEEE International Semiconductor Laser Conference, pp. 9-10, 2010 IEEE 22nd International Semiconductor Laser Conference, ISLC 2010, Kyoto, Japan, 26/09/10. https://doi.org/10.1109/ISLC.2010.5642777

Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL. / Davani, Hooman A.; Grasse, Christian; Kögel, Benjamin et al.
2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010. 2010. p. 9-10 5642777 (Conference Digest - IEEE International Semiconductor Laser Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

AU - Davani, Hooman A.

AU - Grasse, Christian

AU - Kögel, Benjamin

AU - Westbergh, Petter

AU - Gierl, Christian

AU - Zogal, Karolina

AU - Jatta, Sandro

AU - Böhm, Gerhard

AU - Gründl, Tobias

AU - Meissner, Peter

AU - Larsson, Anders

AU - Amann, Markus Christian

PY - 2010

Y1 - 2010

N2 - We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.

AB - We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.

UR - https://www.scopus.com/pages/publications/78651104454

U2 - 10.1109/ISLC.2010.5642777

DO - 10.1109/ISLC.2010.5642777

M3 - Conference contribution

AN - SCOPUS:78651104454

SN - 9781424456833

T3 - Conference Digest - IEEE International Semiconductor Laser Conference

SP - 9

EP - 10

BT - 2010 22nd IEEE International Semiconductor Laser Conference, ISLC 2010

T2 - 2010 IEEE 22nd International Semiconductor Laser Conference, ISLC 2010

Y2 - 26 September 2010 through 30 September 2010

ER -

Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

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