TY - GEN
T1 - What happens turning a 250μm thin piezo-stack sideways?
AU - Zähringer, Sandy
AU - Schwesinger, Norbert
PY - 2009
Y1 - 2009
N2 - This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator anddeflectable membrane.
AB - This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator anddeflectable membrane.
UR - http://www.scopus.com/inward/record.url?scp=70349224161&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:70349224161
SN - 9782355000096
T3 - DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
SP - 394
EP - 397
BT - 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
T2 - 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
Y2 - 1 April 2009 through 3 April 2009
ER -