TY - JOUR
T1 - Trade-off between morphology, extended defects, and compositional fluctuation induced carrier localization in high In-content InGaN films
AU - Ju, James
AU - Loitsch, Bernhard
AU - Stettner, Thomas
AU - Schuster, Fabian
AU - Stutzmann, Martin
AU - Koblmüller, Gregor
PY - 2014/8/7
Y1 - 2014/8/7
N2 - We elucidate the role of growth parameters (III/N flux ratio, temperature TG) on the morphological and structural properties, as well as compositional homogeneity and carrier localization effects of high In-content (x(In)>0.75) In-polar InGaN films grown by plasma-assisted molecular beam epitaxy (PAMBE). Variations in III/N flux ratio evidence that higher excess of In yields higher threading dislocation densities as well as larger compositional inhomogeneity as measured by x-ray diffraction. Most interestingly, by variation of growth temperature TG we find a significant trade-off between improved morphological quality and compositional homogeneity at low-TG (∼450-550°C) versus improved threading dislocation densities at high-TG (∼600-630°C), as exemplified for InGaN films with x(In)=0.9. The enhanced compositional homogeneity mediated by low-TG growth is confirmed by systematic temperature-dependent photoluminescence (PL) spectroscopy data, such as lower PL peakwidths, >5× higher PL efficiency (less temperature-induced quenching) and a distinctly different temperature-dependent S-shape behavior of the PL peak energy. From these, we find that the carrier localization energy is as low as ∼20meV for low-TG grown films (TG=550°C), while it rises to ∼70meV for high-TG grown films (TG= 630°C) right below the onset of In-N dissociation. These findings point out that for the kinetically limited metal-rich PAMBE growth of high In-content InGaN a III/N flux ratio of ∼1 and low-to-intermediate TG are required to realize optically more efficient materials.
AB - We elucidate the role of growth parameters (III/N flux ratio, temperature TG) on the morphological and structural properties, as well as compositional homogeneity and carrier localization effects of high In-content (x(In)>0.75) In-polar InGaN films grown by plasma-assisted molecular beam epitaxy (PAMBE). Variations in III/N flux ratio evidence that higher excess of In yields higher threading dislocation densities as well as larger compositional inhomogeneity as measured by x-ray diffraction. Most interestingly, by variation of growth temperature TG we find a significant trade-off between improved morphological quality and compositional homogeneity at low-TG (∼450-550°C) versus improved threading dislocation densities at high-TG (∼600-630°C), as exemplified for InGaN films with x(In)=0.9. The enhanced compositional homogeneity mediated by low-TG growth is confirmed by systematic temperature-dependent photoluminescence (PL) spectroscopy data, such as lower PL peakwidths, >5× higher PL efficiency (less temperature-induced quenching) and a distinctly different temperature-dependent S-shape behavior of the PL peak energy. From these, we find that the carrier localization energy is as low as ∼20meV for low-TG grown films (TG=550°C), while it rises to ∼70meV for high-TG grown films (TG= 630°C) right below the onset of In-N dissociation. These findings point out that for the kinetically limited metal-rich PAMBE growth of high In-content InGaN a III/N flux ratio of ∼1 and low-to-intermediate TG are required to realize optically more efficient materials.
UR - http://www.scopus.com/inward/record.url?scp=84905975433&partnerID=8YFLogxK
U2 - 10.1063/1.4891990
DO - 10.1063/1.4891990
M3 - Article
AN - SCOPUS:84905975433
SN - 0021-8979
VL - 116
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 5
M1 - 053501
ER -