Abstract
Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict the existence of a steady-state shape for the cluster-size distribution that depends only on a characteristic length determined by the effective diffusion coefficient, the ion solubility, and the volumetric ion flux. The average cluster size in the steady-state regime is determined by the implanted species or matrix interface energy.
Original language | English |
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Article number | 146101 |
Journal | Physical Review Letters |
Volume | 102 |
Issue number | 14 |
DOIs | |
State | Published - 6 Apr 2009 |