Theory of nanocluster size distributions from ion beam synthesis

C. W. Yuan, D. O. Yi, I. D. Sharp, S. J. Shin, C. Y. Liao, J. Guzman, J. W. Ager, E. E. Haller, D. C. Chrzan

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17 Scopus citations


Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict the existence of a steady-state shape for the cluster-size distribution that depends only on a characteristic length determined by the effective diffusion coefficient, the ion solubility, and the volumetric ion flux. The average cluster size in the steady-state regime is determined by the implanted species or matrix interface energy.

Original languageEnglish
Article number146101
JournalPhysical Review Letters
Issue number14
StatePublished - 6 Apr 2009


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