Abstract
A systematic study of the spacial origin to various luminescence peaks in a strain-symmetrized Si6Ge4 superlattice have been perfomed by varying the wavelength of the excitation laser and by selectively etching the sample layer-by-layer and continuously measuring the luminescence. From these measurements we were able to identify the no-phonon luminescense from the superlattice, the defect related L-line luminescence from the constant-composition alloy buffer, and dislocation related D1 and D2 bands in the graded buffer.
Original language | English |
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Pages (from-to) | 165-170 |
Number of pages | 6 |
Journal | Microelectronic Engineering |
Volume | 43-44 |
DOIs | |
State | Published - 1 Aug 1998 |