Abstract
Better precursors are required for plasma enhanced chemical vapor deposition of amorphous silicon and silicon carbide in order to prepare solar cells and optoelectronic materials. Silylmethanes, in which the central C atom is bonded exclusively to Si atoms, are particularly promising. Tetrasilylmethane (4) has now been synthesized from phenylchlorosilane (1) via intermediates 2 and 3. SiC bond cleavage in the last step affords, in addition, trisilylmethane. (Formula Presented.)
| Original language | English |
|---|---|
| Pages (from-to) | 201-203 |
| Number of pages | 3 |
| Journal | Angewandte Chemie International Edition in English |
| Volume | 29 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 1990 |
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Dive into the research topics of 'Tetrasilylmethane, C(SiH3)4, the Si/C‐Inverse of Tetramethylsilane, Si(CH3)4'. Together they form a unique fingerprint.Cite this
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