Abstract
We developed a dedicated measurement set-up for the electrical and electrothermal characterization of semiconductor devices and microsystems under very high-temperature conditions. The set-up consists of several modules comprising a vacuum system as basic unit and a number of alternative sample stages. Currently it enables measurements in the temperature range between room temperature and about 700 °C. We give a detailed description of the measurement system, sample mounting techniques, and exemplary measurements on SiC devices.
Original language | English |
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Pages (from-to) | 1440-1443 |
Number of pages | 4 |
Journal | Microelectronics Reliability |
Volume | 48 |
Issue number | 8-9 |
DOIs | |
State | Published - Aug 2008 |