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Temperature-dependent study of 6H-SiC pin-diode reverse characteristics

  • M. Lades
  • , A. Schenk
  • , U. Krumbein
  • , G. Wachutka
  • , W. Fichtner
  • Technical University of Munich
  • ETH Zurich

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

Silicon carbide is a promising material for special semiconductor applications, such as high-power and high-temperature devices. To date, much effort has been devoted to improving the process and device technology. With the progress in this field, the need for accurate modeling of device characteristics arises. This implies the formulation of proper physical models and their validation. We report on investigations of the reverse characteristics of a 6H-SiC pin diode using the multi-dimensional device simulator DESSIS -ISE discussing the contributions of different physical mechanisms to the blocking behavior and their temperature dependence in the range of 300-623 K.

Original languageEnglish
Title of host publication1996 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 1996
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages55-56
Number of pages2
ISBN (Electronic)0780327454
DOIs
StatePublished - 1996
Event1996 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 1996 - Tokyo, Japan
Duration: 2 Sep 19964 Sep 1996

Publication series

NameInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Conference

Conference1996 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 1996
Country/TerritoryJapan
CityTokyo
Period2/09/964/09/96

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