@inproceedings{f177a0e7bbe94139961626c10ab03619,
title = "Temperature Dependence of Quality Factors at High Frequencies in MEMS Gyroscopes",
abstract = "An efficient simulation approach for obtaining the temperature-dependent thermoelastic damping (TED) quality factors of the mechanical modes in complex microelectromechanical systems (MEMS) gyroscopes is reported. It is shown that the temperature dependence of TED in an application-relevant temperature range can be obtained by a Taylor expansion of the full solution around room temperature. Our approach is much faster than performing the full simulation at every temperature. We find good agreement of our simulation results with measured data and show that TED is highly relevant for the overall quality factors of higher order modes.",
keywords = "MEMS gyroscopes, numerical modelling, quality factors, thermoelastic damping",
author = "Daniel Schiwietz and Weig, \{Eva M.\} and Peter Degenfeld-Schonburg",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",
year = "2023",
doi = "10.1109/MEMS49605.2023.10052368",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "877--880",
booktitle = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023",
}