Temperature Dependence of Quality Factors at High Frequencies in MEMS Gyroscopes

Daniel Schiwietz, Eva M. Weig, Peter Degenfeld-Schonburg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

An efficient simulation approach for obtaining the temperature-dependent thermoelastic damping (TED) quality factors of the mechanical modes in complex microelectromechanical systems (MEMS) gyroscopes is reported. It is shown that the temperature dependence of TED in an application-relevant temperature range can be obtained by a Taylor expansion of the full solution around room temperature. Our approach is much faster than performing the full simulation at every temperature. We find good agreement of our simulation results with measured data and show that TED is highly relevant for the overall quality factors of higher order modes.

Original languageEnglish
Title of host publication2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages877-880
Number of pages4
ISBN (Electronic)9781665493086
DOIs
StatePublished - 2023
Event36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany
Duration: 15 Jan 202319 Jan 2023

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2023-January
ISSN (Print)1084-6999

Conference

Conference36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
Country/TerritoryGermany
CityMunich
Period15/01/2319/01/23

Keywords

  • MEMS gyroscopes
  • numerical modelling
  • quality factors
  • thermoelastic damping

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