Abstract
Vibrational spectra of hydrogen and deuterium in the passivated layer of bulk boron doped crystalline silicon are investigated by Raman scattering. The temperature dependence of line positions and widths is measured in the range 5-450 K and for H(D) concentrations between 1×1019 and 1×1020 cm-3. A strong correlation between shift and broadening of the Raman lines is observed for all samples.
Original language | English |
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Pages (from-to) | 1413-1415 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 51 |
Issue number | 18 |
DOIs | |
State | Published - 1987 |
Externally published | Yes |