TEM INVESTIGATION OF THIN OXIDES IN MOS STRUCTURES.

P. Pongratz, H. Oppolzer, D. Schmitt-Landsiedel, K. Hofmann, G. Dorda, P. Skalicky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Original language	English
Title of host publication	Institute of Physics Conference Series
Publisher	Inst of Physics
Pages	491-494
Number of pages	4
Edition	67
ISBN (Print)	0854981586
State	Published - 1983

Name	Institute of Physics Conference Series
Number	67
ISSN (Print)	0373-0751

Cite this

@inproceedings{08c2cb2aa0694383b2e6ef73e2e3e781,

title = "TEM INVESTIGATION OF THIN OXIDES IN MOS STRUCTURES.",

author = "P. Pongratz and H. Oppolzer and D. Schmitt-Landsiedel and K. Hofmann and G. Dorda and P. Skalicky",

year = "1983",

language = "English",

isbn = "0854981586",

series = "Institute of Physics Conference Series",

publisher = "Inst of Physics",

number = "67",

pages = "491--494",

booktitle = "Institute of Physics Conference Series",

edition = "67",

}

TY - GEN

T1 - TEM INVESTIGATION OF THIN OXIDES IN MOS STRUCTURES.

AU - Pongratz, P.

AU - Oppolzer, H.

AU - Schmitt-Landsiedel, D.

AU - Hofmann, K.

AU - Dorda, G.

AU - Skalicky, P.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020917785&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0020917785

SN - 0854981586

T3 - Institute of Physics Conference Series

SP - 491

EP - 494

BT - Institute of Physics Conference Series

PB - Inst of Physics

ER -