Abstract
Novel mixed amido-/imido-/guanidinato-complexes of tantalum are reported. The complexes were synthesised by insertion reactions of carbodiimides of the type C(NR)2 (R = iso-propyl (i-Pr)) into the M-N bonds of tantalum mixed amido/imido complexes. Three representative complexes were synthesised and fully characterised by 1H-NMR, 13C-NMR, CHN-analysis and mass spectroscopy. The crystal structure of the complex [Ta(NMe 2){(i-Pr-N)2C(NMe2)}2(N-NBu)] (1) (Me = methyl, t-Bu = terf-butyl) is presented and discussed. The complexes are solids that can be quantitatively sublimed at moderate temperatures (120-130°C) without any sign of decomposition. The thermal properties of the new compounds were studied (TGA) and preliminary MOCVD-experiments were performed. TaN films were deposited and characterised by XRD and XPS.
Original language | English |
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Pages (from-to) | 3051-3055 |
Number of pages | 5 |
Journal | Dalton Transactions |
Issue number | 18 |
DOIs | |
State | Published - 21 Sep 2005 |
Externally published | Yes |