Tantalum complexes with all nitrogen coordination sphere: Mixed amido-, imido-, guanidinato complexes of tantalum and their thermal behaviour

Arne Baunemann, Daniel Rische, Andrian Milanov, Younsoo Kim, Manuela Winter, Christian Gemel, Roland A. Fischer

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34 Scopus citations

Abstract

Novel mixed amido-/imido-/guanidinato-complexes of tantalum are reported. The complexes were synthesised by insertion reactions of carbodiimides of the type C(NR)2 (R = iso-propyl (i-Pr)) into the M-N bonds of tantalum mixed amido/imido complexes. Three representative complexes were synthesised and fully characterised by 1H-NMR, 13C-NMR, CHN-analysis and mass spectroscopy. The crystal structure of the complex [Ta(NMe 2){(i-Pr-N)2C(NMe2)}2(N-NBu)] (1) (Me = methyl, t-Bu = terf-butyl) is presented and discussed. The complexes are solids that can be quantitatively sublimed at moderate temperatures (120-130°C) without any sign of decomposition. The thermal properties of the new compounds were studied (TGA) and preliminary MOCVD-experiments were performed. TaN films were deposited and characterised by XRD and XPS.

Original languageEnglish
Pages (from-to)3051-3055
Number of pages5
JournalDalton Transactions
Issue number18
DOIs
StatePublished - 21 Sep 2005
Externally publishedYes

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