Systematic investigation of fluidic damping in mechanical resonators with dimensions ranging from micro-to nano-scale

J. Manz; G. Wachutka; G. Sclirag

doi:10.1016/j.proeng.2014.11.389

Systematic investigation of fluidic damping in mechanical resonators with dimensions ranging from micro-to nano-scale

J. Manz, G. Wachutka, G. Sclirag

Computation, Information and Technology

Technical University of Munich

Research output: Contribution to journal › Conference article › peer-review

Abstract

We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3 Pa for a broad variety of designs. Air gaps underneath the suspended pails ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular flow regime. Two opposed simulation approaches for modelling the aiiflow inside the gap are presented and both approaches are compared to measurements of mechanical resonators.

Original language	English
Pages (from-to)	464-467
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.389
State	Published - 2014
Event	28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sep 2014 → 10 Sep 2014

Keywords

Fluidic damping
Low pressure
Mechanical resonators
Mems
Nems
Q-factor
System level modelling

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10.1016/j.proeng.2014.11.389

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@article{9b1b4a26b63246ac9d67bd354f8109c0,

title = "Systematic investigation of fluidic damping in mechanical resonators with dimensions ranging from micro-to nano-scale",

abstract = "We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3 Pa for a broad variety of designs. Air gaps underneath the suspended pails ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular flow regime. Two opposed simulation approaches for modelling the aiiflow inside the gap are presented and both approaches are compared to measurements of mechanical resonators.",

keywords = "Fluidic damping, Low pressure, Mechanical resonators, Mems, Nems, Q-factor, System level modelling",

author = "J. Manz and G. Wachutka and G. Sclirag",

note = "Publisher Copyright: {\textcopyright} 2014 Published by Elsevier Ltd.; 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 ; Conference date: 07-09-2014 Through 10-09-2014",

year = "2014",

doi = "10.1016/j.proeng.2014.11.389",

language = "English",

volume = "87",

pages = "464--467",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Systematic investigation of fluidic damping in mechanical resonators with dimensions ranging from micro-to nano-scale

AU - Manz, J.

AU - Wachutka, G.

AU - Sclirag, G.

PY - 2014

Y1 - 2014

N2 - We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3 Pa for a broad variety of designs. Air gaps underneath the suspended pails ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular flow regime. Two opposed simulation approaches for modelling the aiiflow inside the gap are presented and both approaches are compared to measurements of mechanical resonators.

AB - We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3 Pa for a broad variety of designs. Air gaps underneath the suspended pails ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular flow regime. Two opposed simulation approaches for modelling the aiiflow inside the gap are presented and both approaches are compared to measurements of mechanical resonators.

KW - Fluidic damping

KW - Low pressure

KW - Mechanical resonators

KW - Mems

KW - Nems

KW - Q-factor

KW - System level modelling

UR - http://www.scopus.com/inward/record.url?scp=84923328755&partnerID=8YFLogxK

U2 - 10.1016/j.proeng.2014.11.389

DO - 10.1016/j.proeng.2014.11.389

M3 - Conference article

AN - SCOPUS:84923328755

SN - 1877-7058

VL - 87

SP - 464

EP - 467

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers, EUROSENSORS 2014

Y2 - 7 September 2014 through 10 September 2014

ER -

Systematic investigation of fluidic damping in mechanical resonators with dimensions ranging from micro-to nano-scale

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Keywords

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