System-level modeling of mems using generalized kirchhoffian networks - basic principles

This chapter explains: how Kirchhoffian network theory can be extended to the simulation of nonelectrical problems; how this approach enables the easy coupling of different energy domains leading to the so-called generalized Kirchhoffian networks, in which not only electrical energy is exchanged; and how this approach can be successfully applied to system-level modeling of microelectromechanical systems (MEMS). It first introduces the underlying theoretical fundamentals of generalized Kirchhoffian network theory on the basis of irreversible thermodynamics, and sketches the way from continuous-field to compact model-based simulation. Finally, the chapter gives a short overview of different compact modeling approaches and their advantages and disadvantages as well as two exemplary applications of physics-based compact modeling. The applications are: physics-based electrofluidic compact model of an electrostatically actuated micropump; and electrostatically actuated RF MEMS switch.