@article{61a7724de8c0401d809703938a8654d1,
title = "Synthesewege zu einfachen Di- und Trisilylmethanen: Potentielle Ausgangsstoffe f{\"u}r die CVD-Abscheidung von amorphem Silicium a-SiC:H",
keywords = "Amorphous Silicon a-SiC:H, Direct Synthesis, Disilylmethane, Polysilylmethanes, Trisilylmethane",
author = "Hubert Schmidbaur and Jan Ebenh{\"o}ch",
year = "1986",
doi = "10.1515/znb-1986-1210",
language = "Deutsch",
volume = "41",
pages = "1527--1534",
journal = "Zeitschrift fur Naturforschung - Section B Journal of Chemical Sciences",
issn = "0932-0776",
publisher = "Walter de Gruyter GmbH",
number = "12",
}