| Translated title of the contribution | Synthetic Pathways to Simple Di- and Trisilylmethanes: Potential Starting Materials for the CVD Deposition of Amorphous Silicon a-SiC:H |
|---|---|
| Original language | German |
| Pages (from-to) | 1527-1534 |
| Number of pages | 8 |
| Journal | Zeitschrift fur Naturforschung - Section B Journal of Chemical Sciences |
| Volume | 41 |
| Issue number | 12 |
| DOIs | |
| State | Published - 1986 |
| Externally published | Yes |
Synthesewege zu einfachen Di- und Trisilylmethanen: Potentielle Ausgangsstoffe für die CVD-Abscheidung von amorphem Silicium a-SiC:H
Hubert Schmidbaur, Jan Ebenhöch
Research output: Contribution to journal › Article › peer-review
29
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