Surface patterning of SrTiO3 by 30 keV ion irradiation

J. Albrecht; S. Leonhardt; R. Spolenak; U. Täffner; H. U. Habermeier; G. Schütz

doi:10.1016/j.susc.2003.10.001

Surface patterning of SrTiO₃ by 30 keV ion irradiation

J. Albrecht, S. Leonhardt, R. Spolenak, U. Täffner, H. U. Habermeier, G. Schütz

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Strontium titanate single crystals are irradiated by using a focused ion beam microscope working with 30 keV gallium ions. Depending on the dose we found different stages of modification at the crystal surface. The topography of the exposed regions is investigated by atomic force microscopy. It is observed that the surface structure strongly depends on the dose of gallium ions.

Original language	English
Pages (from-to)	L847-L852
Journal	Surface Science
Volume	547
Issue number	1-2
DOIs	https://doi.org/10.1016/j.susc.2003.10.001
State	Published - 10 Dec 2003
Externally published	Yes

Keywords

Atomic force microscopy
Ion implantation
Surface structure, morphology, roughness, and topography
Titanium oxide

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10.1016/j.susc.2003.10.001

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title = "Surface patterning of SrTiO3 by 30 keV ion irradiation",

abstract = "Strontium titanate single crystals are irradiated by using a focused ion beam microscope working with 30 keV gallium ions. Depending on the dose we found different stages of modification at the crystal surface. The topography of the exposed regions is investigated by atomic force microscopy. It is observed that the surface structure strongly depends on the dose of gallium ions.",

keywords = "Atomic force microscopy, Ion implantation, Surface structure, morphology, roughness, and topography, Titanium oxide",

author = "J. Albrecht and S. Leonhardt and R. Spolenak and U. T{\"a}ffner and Habermeier, {H. U.} and G. Sch{\"u}tz",

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T1 - Surface patterning of SrTiO3 by 30 keV ion irradiation

AU - Albrecht, J.

AU - Leonhardt, S.

AU - Spolenak, R.

AU - Täffner, U.

AU - Habermeier, H. U.

AU - Schütz, G.

PY - 2003/12/10

Y1 - 2003/12/10

N2 - Strontium titanate single crystals are irradiated by using a focused ion beam microscope working with 30 keV gallium ions. Depending on the dose we found different stages of modification at the crystal surface. The topography of the exposed regions is investigated by atomic force microscopy. It is observed that the surface structure strongly depends on the dose of gallium ions.

AB - Strontium titanate single crystals are irradiated by using a focused ion beam microscope working with 30 keV gallium ions. Depending on the dose we found different stages of modification at the crystal surface. The topography of the exposed regions is investigated by atomic force microscopy. It is observed that the surface structure strongly depends on the dose of gallium ions.

KW - Atomic force microscopy

KW - Ion implantation

KW - Surface structure, morphology, roughness, and topography

KW - Titanium oxide

UR - http://www.scopus.com/inward/record.url?scp=0242493967&partnerID=8YFLogxK

U2 - 10.1016/j.susc.2003.10.001

DO - 10.1016/j.susc.2003.10.001

M3 - Article

AN - SCOPUS:0242493967

SN - 0039-6028

VL - 547

SP - L847-L852

JO - Surface Science

JF - Surface Science

IS - 1-2

ER -

Surface patterning of SrTiO₃ by 30 keV ion irradiation

Abstract

Keywords

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