Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74nm in the range of 1.55m and a wavelength tuning speed of ∼200kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiO _x and SiN _y deposited with low temperature (<100°C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8mW and >1mW over the entire tuning range. The sidemode suppression ratio is >40dB.