Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning

Keyphrases

• Micro-electro-mechanical Systems 100%
• Surface Micromachining 100%
• Vertical-cavity Surface-emitting Laser (VCSEL) 100%
• Mode Tuning 100%
• Mass Production 33%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 33%
• Actuation 33%
• Micromachining 33%
• Power Output 33%
• Dielectric Materials 33%
• Tuning Mechanism 33%
• Tuning Range 33%
• Thermoelectric Properties 33%
• Machining Technology 33%
• Wafer 33%
• Statical 33%
• Developable Surface 33%
• Cavity Length 33%
• Side-mode Suppression Ratio 33%
• Resonant Wavelength 33%
• Distributed Bragg Reflector 33%
• Low-temperature Plasma 33%

Engineering

• Micro-Electro-Mechanical System 100%
• Cavity Surface 100%
• Emitting Laser 100%
• Dielectrics 33%
• Chemical Vapor Deposition 33%
• Low-Temperature 33%
• Output Power 33%
• Bragg Cell 33%
• Surface Micro-Machining 33%
• Cavity Length 33%
• Temperature Plasma 33%
• Actuation 33%
• Vapor Deposition 33%
• Mass Production 33%