Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning

Christian Gierl; Tobias Gründl; Pierluigi Debernardi; Karolina Zogal; Hooman A. Davani; Christian Grasse; Gerhard Böhm; Peter Meissner; Franko Küppers; Markus Christian Amann

doi:10.1117/12.907800

Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning

Christian Gierl, Tobias Gründl, Pierluigi Debernardi, Karolina Zogal, Hooman A. Davani, Christian Grasse, Gerhard Böhm, Peter Meissner, Franko Küppers, Markus Christian Amann

Chair of Semiconductor Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

Original language	English
Title of host publication	Vertical-Cavity Surface-Emitting Lasers XVI
DOIs	https://doi.org/10.1117/12.907800
State	Published - 2012
Event	Vertical-Cavity Surface-Emitting Lasers XVI - San Francisco, CA, United States Duration: 25 Jan 2012 → 26 Jan 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8276
ISSN (Print)	0277-786X

Conference

Conference	Vertical-Cavity Surface-Emitting Lasers XVI
Country/Territory	United States
City	San Francisco, CA
Period	25/01/12 → 26/01/12

Keywords

MEMS
Tunable VCSEL
surface micro-machining

Access to Document

10.1117/12.907800

Cite this

Gierl, C., Gründl, T., Debernardi, P., Zogal, K., Davani, H. A., Grasse, C., Böhm, G., Meissner, P., Küppers, F., & Amann, M. C. (2012). Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning. In Vertical-Cavity Surface-Emitting Lasers XVI Article 82760P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8276). https://doi.org/10.1117/12.907800

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title = "Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning",

abstract = "We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.",

keywords = "MEMS, Tunable VCSEL, surface micro-machining",

author = "Christian Gierl and Tobias Gr{\"u}ndl and Pierluigi Debernardi and Karolina Zogal and Davani, {Hooman A.} and Christian Grasse and Gerhard B{\"o}hm and Peter Meissner and Franko K{\"u}ppers and Amann, {Markus Christian}",

year = "2012",

doi = "10.1117/12.907800",

language = "English",

isbn = "9780819489197",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Vertical-Cavity Surface-Emitting Lasers XVI",

note = "Vertical-Cavity Surface-Emitting Lasers XVI ; Conference date: 25-01-2012 Through 26-01-2012",

}

Gierl, C, Gründl, T, Debernardi, P, Zogal, K, Davani, HA, Grasse, C, Böhm, G, Meissner, P, Küppers, F & Amann, MC 2012, Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning. in Vertical-Cavity Surface-Emitting Lasers XVI., 82760P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8276, Vertical-Cavity Surface-Emitting Lasers XVI, San Francisco, CA, United States, 25/01/12. https://doi.org/10.1117/12.907800

Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning. / Gierl, Christian; Gründl, Tobias; Debernardi, Pierluigi et al.
Vertical-Cavity Surface-Emitting Lasers XVI. 2012. 82760P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8276).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Gierl, Christian

AU - Gründl, Tobias

AU - Debernardi, Pierluigi

AU - Zogal, Karolina

AU - Davani, Hooman A.

AU - Grasse, Christian

AU - Böhm, Gerhard

AU - Meissner, Peter

AU - Küppers, Franko

AU - Amann, Markus Christian

PY - 2012

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N2 - We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

AB - We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

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KW - Tunable VCSEL

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Vertical-Cavity Surface-Emitting Lasers XVI

T2 - Vertical-Cavity Surface-Emitting Lasers XVI

Y2 - 25 January 2012 through 26 January 2012

ER -

Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning

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Keywords

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