Sub-20 nm short channel carbon nanotube transistors

Carbon nanotube field-effect transistors with sub-20 nm long channels and on/off current ratios of >10⁶ are demonstrated. Individual single-walled carbon nanotubes with diameters ranging from 0.7 to 1.1 nm grown from structured catalytic islands using chemical vapor deposition at 700°C form the channels. Electron beam lithography and a combination of HSQ, calixarene, and PMMA e-beam resists were used to structure the short channels and source and drain regions. The nanotube transistors display on-currents in excess of 15 μA for drain-source biases of only 0.4 V.