Study of a new plasma source for free-standing plasmas

Ulrich Schweitzer, Andreas Schulz, Matthias Walker, Uwe Schumacher, Ulrich Stroth, Klaus Martin Baumgärtner

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f=2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.

Original languageEnglish
Pages (from-to)S978-S981
JournalPlasma Processes and Polymers
Volume4
Issue numberSUPPL.1
DOIs
StatePublished - 2007
Externally publishedYes

Keywords

  • Free-standing plasma
  • Langnuir probes
  • Microwave discharges

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