Study of a new plasma source for free-standing plasmas

Ulrich Schweitzer; Andreas Schulz; Matthias Walker; Uwe Schumacher; Ulrich Stroth; Klaus Martin Baumgärtner

doi:10.1002/ppap.200732311

Study of a new plasma source for free-standing plasmas

Ulrich Schweitzer, Andreas Schulz, Matthias Walker, Uwe Schumacher, Ulrich Stroth, Klaus Martin Baumgärtner

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f=2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.

Original language	English
Pages (from-to)	S978-S981
Journal	Plasma Processes and Polymers
Volume	4
Issue number	SUPPL.1
DOIs	https://doi.org/10.1002/ppap.200732311
State	Published - 2007
Externally published	Yes

Keywords

Free-standing plasma
Langnuir probes
Microwave discharges

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10.1002/ppap.200732311

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title = "Study of a new plasma source for free-standing plasmas",

abstract = "A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f=2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.",

keywords = "Free-standing plasma, Langnuir probes, Microwave discharges",

author = "Ulrich Schweitzer and Andreas Schulz and Matthias Walker and Uwe Schumacher and Ulrich Stroth and Baumg{\"a}rtner, {Klaus Martin}",

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doi = "10.1002/ppap.200732311",

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T1 - Study of a new plasma source for free-standing plasmas

AU - Schweitzer, Ulrich

AU - Schulz, Andreas

AU - Walker, Matthias

AU - Schumacher, Uwe

AU - Stroth, Ulrich

AU - Baumgärtner, Klaus Martin

PY - 2007

Y1 - 2007

N2 - A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f=2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.

AB - A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f=2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.

KW - Free-standing plasma

KW - Langnuir probes

KW - Microwave discharges

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DO - 10.1002/ppap.200732311

M3 - Article

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SN - 1612-8850

VL - 4

SP - S978-S981

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - SUPPL.1

ER -

Study of a new plasma source for free-standing plasmas

Abstract

Keywords

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