Structures of (C5H5N)3Al(N3)3, [Me2N(CH2)3]2Al(N3) and Me2(N3)Al(H2NBut). Low-temperature OMVPE of AlN in the absence of ammonia

Roland A. Fischer, Alexander Miehr, Harald Sussek, Hans Pritzkow, Eberhardt Herdtweck, Jens Müller, Oliver Ambacher, Thomas Metzger

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Abstract

New Lewis-base stabilized monomeric azido alanes are synthesized by salt metathesis from the corresponding chloro alanes and an excess of sodium azide; thin films of crystalline AlN are grown by OMVPE at 400-850°C in vacuo.

Original languageEnglish
Pages (from-to)2685-2686
Number of pages2
JournalChemical Communications
Issue number23
DOIs
StatePublished - 1996
Externally publishedYes

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