States of hydrogen in crystalline silicon

The thermal transformation of deuterium in p-type crystalline silicon is studied with a variety of experimental techniques. It is found that D-atoms initially trapped at acceptor sites can be transferred by low temperature annealing to a different state tentatively ascribed to interstitial D₂ molecules. Diffusion of D out of the passivated sample only occurs at temperatures significantly higher than this transformation temperature. This fact allows us to produce Si samples with extremely high deuterium concentrations (several at%) by a suitable passivation-annealing sequence. With increasing D-concentration, a number of characteristic Si-D defect complexes have been observed by vibrational spectroscopy.