@inproceedings{7cc4f3c980764e7e9e505755ff1abf8d,
title = "Squeeze-film damping in perforated microstructures: Modeling, simulation and pressure-dependent experimental validation",
abstract = "Two compact models and one mixed-level model of squeeze-film damping in perforated microstructures are benchmarked w.r.t. pressure-dependent experimental data of three microstructures of different sizes and with different perforation levels. The mixed-level model shows very good agreement with the measured data. The maximum error at normal pressure is 4 %. The compact models show acceptable agreement for the largest structure, but show errors exceeding 30 % for the smaller structures. An analysis of pressure profiles indicates that the considerable error of the compact models originates from neglecting boundary effects. The mixed-level model includes boundary effects and is thus able to produce accurate results for all of the three structures.",
keywords = "Benchmark, Experimental validation, MEMS, Modeling, Squeeze-film damping",
author = "Martin Niessner and Gabriele Schrag and Jacopo Iannacci and Gerhard Wachutka",
year = "2012",
language = "English",
isbn = "9781466562752",
series = "Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012",
pages = "598--601",
booktitle = "Nanotechnology 2012",
note = "Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 ; Conference date: 18-06-2012 Through 21-06-2012",
}