Abstract
We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also provides very large flexibility with respect to device geometry and the constituent components of a microsystem. The proposed damping model is realized in VHDL-AMS and can be easily included in system level models for full system simulation. The method has been successfully demonstrated for elementary micromechanical structures. The results from the mixed level simulation approach conform very well with 3D-Navier-Stokes-based FEM simulations showing the applicability of our methodology.
Original language | English |
---|---|
Title of host publication | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 |
Editors | M. Laudon, B. Romanowicz |
Pages | 92-95 |
Number of pages | 4 |
State | Published - 2001 |
Event | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 - Hilton Head Island, SC, United States Duration: 19 Mar 2001 → 21 Mar 2001 |
Publication series
Name | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 |
---|
Conference
Conference | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 |
---|---|
Country/Territory | United States |
City | Hilton Head Island, SC |
Period | 19/03/01 → 21/03/01 |
Keywords
- Compact modeling
- Mixed level simulation
- Non-trivial geometries
- Squeeze film damping effects