Spatial resolution limit for the investigation of high-TC films by low temperature scanning electron microscopy

R. Gross; M. Hartmann; K. Hipler; R. P. Huebener; F. Kober; D. Koelle

doi:10.1109/20.92756

Spatial resolution limit for the investigation of high-TC films by low temperature scanning electron microscopy

R. Gross, M. Hartmann, K. Hipler, R. P. Huebener, F. Kober, D. Koelle

University of Tübingen

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

Low Temperature Scanning Electron Microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron beam induced thermal perturbation of high-Tc films and the resulting spatial resolution limit is discussed. Typical examples illustrating the new imaging technique are presented.

Original language	English
Pages (from-to)	2250-2253
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	25
Issue number	2
DOIs	https://doi.org/10.1109/20.92756
State	Published - Mar 1989
Externally published	Yes

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title = "Spatial resolution limit for the investigation of high-TC films by low temperature scanning electron microscopy",

abstract = "Low Temperature Scanning Electron Microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron beam induced thermal perturbation of high-Tc films and the resulting spatial resolution limit is discussed. Typical examples illustrating the new imaging technique are presented.",

author = "R. Gross and M. Hartmann and K. Hipler and Huebener, {R. P.} and F. Kober and D. Koelle",

year = "1989",

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AU - Gross, R.

AU - Hartmann, M.

AU - Hipler, K.

AU - Huebener, R. P.

AU - Kober, F.

AU - Koelle, D.

PY - 1989/3

Y1 - 1989/3

N2 - Low Temperature Scanning Electron Microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron beam induced thermal perturbation of high-Tc films and the resulting spatial resolution limit is discussed. Typical examples illustrating the new imaging technique are presented.

AB - Low Temperature Scanning Electron Microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron beam induced thermal perturbation of high-Tc films and the resulting spatial resolution limit is discussed. Typical examples illustrating the new imaging technique are presented.

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U2 - 10.1109/20.92756

DO - 10.1109/20.92756

M3 - Article

AN - SCOPUS:0024626922

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EP - 2253

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

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ER -

Spatial resolution limit for the investigation of high-TC films by low temperature scanning electron microscopy

Abstract

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