@inproceedings{a9568473d626456caf757331878a7122,
title = "Simulation von D{\"a}mpfungseffekten in unregelm{\"a}{\ss}ig perforierten MEMS Bauteilen durch Kompaktmodelle",
abstract = "Accurate modeling of damping effects in high-end MEMS devices is a major challenge due to low feature sizes and complex device geometries. By applying a finite network approach with specially derived compact models, we are able to simulate structures with varying perforation patterns and account for the impact of the transition regions between differently perforated areas. Simulations and measurements of exemplary test structures with different perforation sizes and patterns prove the feasibility of our approach, which perspectively improves the accuracy of damping estimation beyond state of the art.",
author = "Friederike Michael and Gabriele Schrag",
note = "Publisher Copyright: {\textcopyright} VDE VERLAG GMBH ∙ Berlin ∙ Offenbach.; MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat MicroSystems Technology Congress 2023: Microelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty ; Conference date: 23-10-2023 Through 25-10-2023",
year = "2023",
language = "Deutsch",
series = "MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings",
publisher = "VDE VERLAG GMBH",
pages = "499--502",
booktitle = "MikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings",
}