@inproceedings{5464aed553c24aa2bd7060f57e7551c5,
title = "Simulation of thick film PZT actuators with interdigitated electrodes",
abstract = "This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 μm thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.",
keywords = "FEM-simulation, Interdigitated electrodes, Micro actuator, Piezoelectric non-linearity, Thick film",
author = "{Mohammed Zaki}, M. and Sandy Zahringer and Norbert Schwesinger",
year = "2013",
doi = "10.1117/12.2017411",
language = "English",
isbn = "9780819495600",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Smart Sensors, Actuators, and MEMS VI",
note = "Conference Smart Sensors, Actuators, and MEMS VI ; Conference date: 24-04-2013 Through 26-04-2013",
}