Simulation of thick film PZT actuators with interdigitated electrodes

M. Mohammed Zaki, Sandy Zahringer, Norbert Schwesinger

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 μm thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.

Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS VI
StatePublished - 2013
EventConference Smart Sensors, Actuators, and MEMS VI - Grenoble, France
Duration: 24 Apr 201326 Apr 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceConference Smart Sensors, Actuators, and MEMS VI


  • FEM-simulation
  • Interdigitated electrodes
  • Micro actuator
  • Piezoelectric non-linearity
  • Thick film


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