Simulation of Anchor Loss in MEMS Resonators Using Perfectly Matched Layers

Daniel Schiwietz, Laukik R. More, Eva M. Weig, Peter Degenfeld-Schonburg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Recently, it has been shown that there is a significant pressure and temperature independent damping contribution for high-frequency modes in commercial MEMS gyroscopes. In order to investigate the contribution of anchor losses to the observed damping, perfectly matched layer (PML) simulations can be employed. This work serves as a preparatory step towards the simulation of anchor losses in complex MEMS gyroscopes. We focus on simple geometries, in order to infer general modelling rules for the setup of PML simulations. Therefore, we simulate a cantilever beam and verfiy the simulations with existing analytic results. We demonstrate a systematic approach to set up anchor loss models of MEMS resonators, which yields reliable results for various mode shapes. Furthermore, we simulate two coupled cantilever beams and show that degenerate modes, only differing in symmetries, have significantly different anchor loss quality factors. The insights gained from these simple geometries will be applied to the simulation of complex MEMS gyroscopes in the future.

Original languageEnglish
Title of host publicationINERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665451475
DOIs
StatePublished - 2023
Externally publishedYes
Event10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023 - Lihue, United States
Duration: 28 Mar 202331 Mar 2023

Publication series

NameINERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023
Country/TerritoryUnited States
CityLihue
Period28/03/2331/03/23

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