Abstract
Deposition of SiOx layers by low-pressure microwave plasmas is an excellent means to add missing barrier functionalities to cheap and material-saving homo-polymeric materials that will increasingly replace expensive multi-layer polymer food packaging. SiOx coatings were deposited in an ECR plasma process on polyethyleneterephthalate (PET) foils using two different precursors, HMDSO and HMDSN. O2 transition rates of less than 1 cm3 (m-2·24 h -1·bar-1) were obtained for the best performing SiOx coatings deposited from O2/HMDSN gas mixtures. First ECR plasma deposition tests on polypropylene (PP) trays show the high barrier potential of SiOx coatings even on three-dimensional polymer food packaging.
| Original language | English |
|---|---|
| Pages (from-to) | S700-S704 |
| Journal | Plasma Processes and Polymers |
| Volume | 6 |
| Issue number | SUPPL. 1 |
| DOIs | |
| State | Published - 2009 |
| Externally published | Yes |
Keywords
- Barrier
- Food packaging
- Gas permeation
- Microwave discharges
- Silicon oxide
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