Self-Terminated CVD-Functionalization of Organic Self-Assembled Monolayers (SAMs) with Trimethylamine Alane (TMAA)

Jurij Weiß, Hans Jörg Himmel, Roland A. Fischer, Christof Wöll

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

Chemoselective deposition of alane and patterned deposition of alane and aluminum oxide on ultrathin organic self-assembled monolayers (SAMs) were investigated. Information about elementary steps of the interaction of trimethyl amine alane (TMAA) with appropriately functionalized HO- and HOOC-terminated SAMs under UHV conditions is presented. The self-terminated growth of an alane bilayer on HO-terminated SAMs was established on the basis of quantitative X-ray photoelectron spectroscopy (XPS) analysis. A patterned deposition of 2 nm of aluminum oxide on patterned SAMs obtained by microcontact printing is demonstrated.

Original languageEnglish
Pages (from-to)17-21
Number of pages5
JournalChemical Vapor Deposition
Volume4
Issue number1
DOIs
StatePublished - Jan 1998
Externally publishedYes

Keywords

  • CVD
  • Functionalized SAMs
  • Selective deposition
  • Surface chemistry
  • Trimethylamine alane

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