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Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor

  • Shinjita Acharya
  • , Jan Torgersen
  • , Yongmin Kim
  • , Joonsuk Park
  • , Peter Schindler
  • , Anup L. Dadlani
  • , Martin Winterkorn
  • , Shicheng Xu
  • , Stephen P. Walch
  • , Takane Usui
  • , Christian Schildknecht
  • , Fritz B. Prinz
  • Stanford University
  • BASF Corporation USA
  • BASF Corporation

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

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