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Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor
Shinjita Acharya, Jan Torgersen, Yongmin Kim, Joonsuk Park, Peter Schindler, Anup L. Dadlani, Martin Winterkorn, Shicheng Xu, Stephen P. Walch, Takane Usui, Christian Schildknecht, Fritz B. Prinz
Research output: Contribution to journal › Article › peer-review
28
Scopus
citations