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Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications

  • Hyeon Ho Jeong
  • , Andrew G. Mark
  • , Tung Chun Lee
  • , Kwanghyo Son
  • , Wenwen Chen
  • , Mariana Alarcón-Correa
  • , Insook Kim
  • , Gisela Schütz
  • , Peer Fischer
  • Max Planck Institute for Intelligent Systems
  • University College London
  • Heidelberg University
  • Universität Stuttgart

Research output: Contribution to journalArticlepeer-review

17 Scopus citations
Original languageEnglish
Article number1500016
JournalAdvanced Science
Volume2
Issue number7
DOIs
StatePublished - Jul 2015
Externally publishedYes

Keywords

  • block copolymer micelle nanolithography
  • glancing angle deposition
  • nanoimprint lithography
  • nanoparticle lithography
  • shadow growth physical vapor deposition

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