Selectable Nanopattern Arrays for Nanolithographic Imprint and Etch-Mask Applications

Hyeon Ho Jeong, Andrew G. Mark, Tung Chun Lee, Kwanghyo Son, Wenwen Chen, Mariana Alarcón-Correa, Insook Kim, Gisela Schütz, Peer Fischer

Research output: Contribution to journalArticlepeer-review

16 Scopus citations
Original languageEnglish
Article number1500016
JournalAdvanced Science
Volume2
Issue number7
DOIs
StatePublished - Jul 2015
Externally publishedYes

Keywords

  • block copolymer micelle nanolithography
  • glancing angle deposition
  • nanoimprint lithography
  • nanoparticle lithography
  • shadow growth physical vapor deposition

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