Scribing into hydrogenated diamond surfaces using atomic force microscopy

B. Rezek, C. Sauerer, J. A. Garrido, C. E. Nebel, M. Stutzmann, E. Snidero, P. Bergonzo

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


The surface termination of hydrogenated diamond surfaces with lateral resolution of ∼ 10 nm was controlled using atomic force microscopy (AFM). Microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm using negatively biased silicon cantilevers. Electron affinity and conductivity were exhibited to the rest of the surface by the inscribed patterns. The effect of noncontact and contact AFM on pattern appearance was also discussed.

Original languageEnglish
Pages (from-to)3336-3338
Number of pages3
JournalApplied Physics Letters
Issue number19
StatePublished - 12 May 2003


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