Scribing into hydrogenated diamond surfaces using atomic force microscopy

B. Rezek; C. Sauerer; J. A. Garrido; C. E. Nebel; M. Stutzmann; E. Snidero; P. Bergonzo

doi:10.1063/1.1576507

Scribing into hydrogenated diamond surfaces using atomic force microscopy

B. Rezek, C. Sauerer, J. A. Garrido, C. E. Nebel, M. Stutzmann, E. Snidero, P. Bergonzo

TUM Emeriti of Excellence

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

The surface termination of hydrogenated diamond surfaces with lateral resolution of ∼ 10 nm was controlled using atomic force microscopy (AFM). Microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm using negatively biased silicon cantilevers. Electron affinity and conductivity were exhibited to the rest of the surface by the inscribed patterns. The effect of noncontact and contact AFM on pattern appearance was also discussed.

Original language	English
Pages (from-to)	3336-3338
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	19
DOIs	https://doi.org/10.1063/1.1576507
State	Published - 12 May 2003

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10.1063/1.1576507

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abstract = "The surface termination of hydrogenated diamond surfaces with lateral resolution of ∼ 10 nm was controlled using atomic force microscopy (AFM). Microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm using negatively biased silicon cantilevers. Electron affinity and conductivity were exhibited to the rest of the surface by the inscribed patterns. The effect of noncontact and contact AFM on pattern appearance was also discussed.",

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AU - Garrido, J. A.

AU - Nebel, C. E.

AU - Stutzmann, M.

AU - Snidero, E.

AU - Bergonzo, P.

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AB - The surface termination of hydrogenated diamond surfaces with lateral resolution of ∼ 10 nm was controlled using atomic force microscopy (AFM). Microscopic patterns can be scribed into a diamond surface, up to a depth of 3 nm using negatively biased silicon cantilevers. Electron affinity and conductivity were exhibited to the rest of the surface by the inscribed patterns. The effect of noncontact and contact AFM on pattern appearance was also discussed.

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Scribing into hydrogenated diamond surfaces using atomic force microscopy

Abstract

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