Abstract
A rotor is supported contactless and without any wear by using electromagnetic bearings. In addition, the dynamical behavior of the rotor is optimized by controlling the bearing forces according to a specified control law. The electromagnetic actuators have been developed as selfcontained bearing elements. Due to their linear input/output characteristic they can be easily integrated into the multivariable control loop of the rotor-bearing-system. system. The theoretical results are corroborated by experiments. The rotor was developed for application in liquid-phase epitaxial growth of very thin semiconductor layers.
| Original language | English |
|---|---|
| Pages (from-to) | 181-184 |
| Number of pages | 4 |
| Journal | Urban Systems |
| Volume | 1 |
| State | Published - 1979 |
| Event | Proc of the World Congr on the Theory of Mach and Mech, 5th - Montreal, Que, Can Duration: 8 Jul 1979 → 13 Jul 1979 |