Room temperature electroluminescence of Er-implanted silicon diodes grown by MBE

  • M. Jaumann
  • , J. Stimmer
  • , P. Schittenhelm
  • , J. F. Nützel
  • , G. Abstreiter
  • , E. Neufeld
  • , B. Holländer
  • , Ch Buchal

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We investigated the room temperature electroluminescence of Er doped silicon diodes codoped with O or F as a function of dopant concentration and annealing conditions. Samples with Er concentrations of 5 × 1017 cm-3 and 1018 cm-3 show the most intense luminescence at λ = 1.54 μm. In case of F codoping the Er3+ peak intensity at 300 K is weak and there is a strong defect related peak at about the same wavelength.

Original languageEnglish
Pages (from-to)327-330
Number of pages4
JournalApplied Surface Science
Volume102
DOIs
StatePublished - Aug 1996

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