Abstract
We investigated the room temperature electroluminescence of Er doped silicon diodes codoped with O or F as a function of dopant concentration and annealing conditions. Samples with Er concentrations of 5 × 1017 cm-3 and 1018 cm-3 show the most intense luminescence at λ = 1.54 μm. In case of F codoping the Er3+ peak intensity at 300 K is weak and there is a strong defect related peak at about the same wavelength.
Original language | English |
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Pages (from-to) | 327-330 |
Number of pages | 4 |
Journal | Applied Surface Science |
Volume | 102 |
DOIs | |
State | Published - Aug 1996 |