Response mechanism of SiC-based MOS field-effect gas sensors

Jan Schalwig, Patrick Kreisl, Simon Ahlers, Gerhard Müller

Research output: Contribution to journalArticlepeer-review

66 Scopus citations


SiC-based field-effect gas sensors with catalytic platinum electrodes (Pt-MOSiC) have been subjected to a series of gas response measurements. Structural analysis of the Pt electrodes revealed that the gas sensitivity and the selectivity of Pt-MOSiC gas sensors depend on two major parameters: the porosity and the catalytic activity of the Pt electrodes. Pt-MOSiC gas sensors with thick, dense Pt electrodes only exhibit hydrogen sensitivity, whereas Pt-MOSiCs with thin porous gates exhibit a broad range of gas sensitivities similar to resistive metal-oxide gas sensors. A model is put forward that explains the nonhydrogen gas response of Pt-MOSiC devices and of conventional polycrystalline metal-oxide materials on a common basis.

Original languageEnglish
Pages (from-to)394-402
Number of pages9
JournalIEEE Sensors Journal
Issue number5
StatePublished - 2002
Externally publishedYes


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