Reliable system-level models for electrostatically actuated devices under varying ambient conditions: Modeling and validation

We present a physics-based multi-energy domain macromodel that allows - in general - for the efficient simulation of any electrostatic actuator within standard IC frameworks and apply it exemplarily to an RF-MEMS switch. The predictive power of this macromodel, which depends crucially on the quality of the applied damping and contact models, has been evaluated by white light interferometer and laser vibrometer measurements. It turned out that the models for viscous damping as well as for the electromechanical energy domain are in very good agreement with the experiments while the applied standard contact model fails in reproducing the measured contact phenomena. Based on these findings suggestions for improved system-level contact models are discussed.