TY - GEN
T1 - Reduced Shell Model for the Simulation of Crosstalk in Piezoelectric Micromachined Ultrasound Transducer Arrays
AU - Möhrle, Philipp
AU - Bajt, Aleskander
AU - Schrag, Gabriele
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - Piezoelectric micromachined ultrasonic transducers (PMUTs) offer a promising approach for generating ultrasonic waves across various applications. Typically utilized in large arrays, this poses significant challenges on design and simulation, particularly if crosstalk induced by surface acoustic waves (SAWs) are to be modeled, leading to extensive computation times and a large amount of random-access memory needed. To overcome these challenges, we developed a Finite Element Method (FEM)-based shell model of a PMUT cell, which we benchmarked against an FEM solid model. This shell model significantly reduces simulation time while maintaining high accuracy in predicting sound radiation, eigenfrequency and in-plane stress. When applied to large arrays, this model enables the exploration of acoustic radiation with phase-varied arrays and the mutual interactions of PMUT cells through surface acoustic waves.
AB - Piezoelectric micromachined ultrasonic transducers (PMUTs) offer a promising approach for generating ultrasonic waves across various applications. Typically utilized in large arrays, this poses significant challenges on design and simulation, particularly if crosstalk induced by surface acoustic waves (SAWs) are to be modeled, leading to extensive computation times and a large amount of random-access memory needed. To overcome these challenges, we developed a Finite Element Method (FEM)-based shell model of a PMUT cell, which we benchmarked against an FEM solid model. This shell model significantly reduces simulation time while maintaining high accuracy in predicting sound radiation, eigenfrequency and in-plane stress. When applied to large arrays, this model enables the exploration of acoustic radiation with phase-varied arrays and the mutual interactions of PMUT cells through surface acoustic waves.
KW - Crosstalk
KW - Finite Element Methode
KW - MEMS
KW - PMUT
KW - Surface Acoustic Waves
UR - https://www.scopus.com/pages/publications/105007411423
U2 - 10.1109/EuroSimE65125.2025.11006631
DO - 10.1109/EuroSimE65125.2025.11006631
M3 - Conference contribution
AN - SCOPUS:105007411423
T3 - Proceedings - 2025 26th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2025
BT - Proceedings - 2025 26th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 26th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2025
Y2 - 6 April 2025 through 9 April 2025
ER -