TY - GEN
T1 - Reduced-order modeling of capacitive MEMS microphones using mixed-level simulation
AU - Niessner, M.
AU - Bedyk, W.
AU - Schrag, G.
AU - Wachutka, G.
AU - Margesin, B.
AU - Faes, A.
PY - 2006
Y1 - 2006
N2 - We demonstrate a reduced-order modeling methodology based on the mixed-level simulation approach that allows for the rapid evaluation of microphone design variations with arbitrary arrangement and shape of the acoustic holes. The resulting reduced-order models take multiply coupled energy domains into account and are capable of describing the effects caused by non-linear fluidic damping. The methodology is easily approachable, as the generation of the reduced-order models is automated by the use of a MATLAB toolbox.
AB - We demonstrate a reduced-order modeling methodology based on the mixed-level simulation approach that allows for the rapid evaluation of microphone design variations with arbitrary arrangement and shape of the acoustic holes. The resulting reduced-order models take multiply coupled energy domains into account and are capable of describing the effects caused by non-linear fluidic damping. The methodology is easily approachable, as the generation of the reduced-order models is automated by the use of a MATLAB toolbox.
UR - http://www.scopus.com/inward/record.url?scp=46749088394&partnerID=8YFLogxK
U2 - 10.1109/ASDAM.2006.331209
DO - 10.1109/ASDAM.2006.331209
M3 - Conference contribution
AN - SCOPUS:46749088394
SN - 1424403960
SN - 9781424403967
T3 - Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06
SP - 283
EP - 286
BT - Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06
T2 - 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06
Y2 - 16 October 2006 through 18 October 2006
ER -