Reactive etching of positive and negative silicon cluster ions by nitrogen dioxide

Mary L. Mandich, Vladimir E. Bondybey, William D. Reents

Research output: Contribution to journalArticlepeer-review

98 Scopus citations

Abstract

Positively and negatively charged silicon cluster ions, Si 1-8 + and Si1-6 -, react exothermically with NO2. The predominant reaction is loss of a single silicon atom in the form of SiO. This reaction repeats sequentially such that the clusters are "etched" down to monatomic silicon ions. Charge transfer to form NO2 - also occurs for Si 1-4 -. Previous results have shown that all Si 1-6 - exhibit electron transfer to WF6. Together, these observations bracket the electron affinities of the neutral silicon clusters: EA (Si2-4)≤2.6 eV and 2.6 eV≤EA (Si 5-6)≤3.7 eV. The reaction rates for the silicon cluster cations decrease slowly from 7.3±0.8x10-10 to 0.4±0.2x10 -10 cm3 molecule-1 s-1 with increasing cluster size for Si1-8 +. Silicon cluster anion reaction rates show a slight decrease from 15±1x10-10 to 5.0±0.1x10-10 cm3 molecule-1 s -1 with increasing cluster size for Si1-6 -. The ionic silicon cluster reactivity is explained by a radical-radical coupling mechanism involving the unpaired electron on NO2 and an unpaired electron on a silicon atom at a charged or trivalent center in the clusters. Involvement of a radical electron on the silicon cluster contrasts with ionic silicon cluster reactivity with CH3SiH3 which requires divalent, silylene reactive centers on the clusters. Previously identified "magic number" clusters, Si4 + and Si 6 +, do not exhibit atypical reaction rates or products in spite of a theoretically derived 1-2 eV lower reaction exothermicity relative to the other cluster sizes.

Original languageEnglish
Pages (from-to)4245-4257
Number of pages13
JournalJournal of Chemical Physics
Volume86
Issue number7
DOIs
StatePublished - 1987
Externally publishedYes

Fingerprint

Dive into the research topics of 'Reactive etching of positive and negative silicon cluster ions by nitrogen dioxide'. Together they form a unique fingerprint.

Cite this